Inventor
SHRESTHA KIRAN LALL
US13 patents
Patents
13 patentsUS11847776B2Dec 19, 2023
System using film thickness estimation from machine learning based processing of substrate images
APPLIED MATERIALS INC4 citations84
US11780047B2Oct 10, 2023
Determination of substrate layer thickness with polishing pad wear compensation
APPLIED MATERIALS INC4 citations74
US11658078B2May 23, 2023
Using a trained neural network for use in in-situ monitoring during polishing and polishing system
APPLIED MATERIALS INC1 citations72
US11836913B2Dec 5, 2023
Film thickness estimation from machine learning based processing of substrate images
APPLIED MATERIALS INC2 citations71
US12136574B2Nov 5, 2024
Technique for training neural network for use in in-situ monitoring during polishing and polishing system
APPLIED MATERIALS INC0 citations62
US12090599B2Sep 17, 2024
Determination of substrate layer thickness with polishing pad wear compensation
APPLIED MATERIALS INC0 citations62
US12057354B2Aug 6, 2024
Trained neural network in in-situ monitoring during polishing and polishing system
APPLIED MATERIALS INC0 citations62
US11791224B2Oct 17, 2023
Technique for training neural network for use in in-situ monitoring during polishing and polishing system
APPLIED MATERIALS INC0 citations62
US12272047B2Apr 8, 2025
Residue measurement from machine learning based processing of substrate images
APPLIED MATERIALS INC0 citations61
US12169925B2Dec 17, 2024
System using film thickness estimation from machine learning based processing of substrate images
APPLIED MATERIALS INC0 citations61
US9679823B2Jun 13, 2017
Metric for recognizing correct library spectrum
APPLIED MATERIALS INC0 citations50
US12447578B2Oct 21, 2025
Compensation for substrate doping in edge reconstruction for in-situ electromagnetic inductive monitoring
APPLIED MATERIALS INC0 citations48
US9482610B2Nov 1, 2016
Techniques for matching spectra
APPLIED MATERIALS INC0 citations41