Inventor
SATO MITSUYOSHI
24 patents
⚠️ This page may combine multiple inventors who share the name “SATO MITSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEIKO INSTR INC
5 patentsUS6621082B2Sep 16, 2003
Automatic focusing system for scanning electron microscope equipped with laser defect detection function
SEIKO INSTR INC110 citations98
US4851097AJul 25, 1989
Apparatus for repairing a pattern film
SEIKO INSTR INC63 citations93
US6037589AMar 14, 2000
Electron beam device
SEIKO INSTR INC45 citations92
US4930439AJun 5, 1990
Mask-repairing device
SEIKO INSTR INC21 citations82
US4902530AFeb 20, 1990
Method of correcting a pattern film
SEIKO INSTR INC16 citations73
TOA GOSEI CHEM IND
3 patentsTOSHIBA KK
3 patentsUS7772451B2Aug 10, 2010
System and method for chemical decontamination of radioactive material
TOSHIBA KK5 citations72
US7087120B1Aug 8, 2006
System and method for chemical decontamination of radioactive material
TOSHIBA KK7 citations72
US7622627B2Nov 24, 2009
System and method for chemical decontamination of radioactive material
TOSHIBA KK1 citations61