P

Inventor

WELING MILIND

US29 patents
⚠️ This page may combine multiple inventors who share the name “WELING MILIND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VLSI TECHNOLOGY INC

12 patents
US5420796AMay 30, 1995

Method of inspecting planarity of wafer surface after etchback step in integrated circuit fabrication

VLSI TECHNOLOGY INC141 citations98
US5757502AMay 26, 1998

Method and a system for film thickness sample assisted surface profilometry

VLSI TECHNOLOGY INC66 citations96
US5522957AJun 4, 1996

Method for leak detection in etching chambers

VLSI TECHNOLOGY INC28 citations93
US5399533AMar 21, 1995

Method improving integrated circuit planarization during etchback

VLSI TECHNOLOGY INC41 citations93
US5378318AJan 3, 1995

Planarization

VLSI TECHNOLOGY INC33 citations93
US6319796B1Nov 20, 2001

Manufacture of an integrated circuit isolation structure

VLSI TECHNOLOGY INC44 citations89
US6242805B1Jun 5, 2001

Method of using a polish stop film to control dishing during copper chemical mechanical polishing

VLSI TECHNOLOGY INC15 citations84
US6353261B1Mar 5, 2002

Method and apparatus for reducing interconnect resistance using an interconnect well

VLSI TECHNOLOGY INC11 citations74
US6114246ASep 5, 2000

Method of using a polish stop film to control dishing during copper chemical mechanical polishing

VLSI TECHNOLOGY INC15 citations74
US6022265AFeb 8, 2000

Complementary material conditioning system for a chemical mechanical polishing machine

VLSI TECHNOLOGY INC10 citations70
US6211087B1Apr 3, 2001

Chemical wet etch removal of underlayer material after performing chemical mechanical polishing on a primary layer

VLSI TECHNOLOGY INC6 citations62
US6410440B1Jun 25, 2002

Method and apparatus for a gaseous environment providing improved control of CMP process

VLSI TECHNOLOGY INC6 citations60

INTERMOLECULAR INC

6 patents

KONINKL PHILIPS ELECTRONICS NV

3 patents

HUCKABAY JUDY

2 patents

WELING MILIND

2 patents

PHILIPS ELECTRONICS NA

1 patent

VLSI TECHNOLGY INC

1 patent

CADENCE DESIGN SYSTEMS INC

1 patent

PHILLIPS ELECTRONICS NORTH AME

1 patent