Inventor
MOTOYAMA SHUICHIRO
JP9 patents
Patents
9 patentsUS5546261AAug 13, 1996
Superconducting fault current limiter
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Wafer support table with ceramic substrate including core and surface layer
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Ceramic heater
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Wafer placement table and method for manufacturing the same
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Ceramic heater
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Ceramic heater
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Ceramic heater and thermocouple guide
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