Inventor
MINATO MITSUAKI
JP10 patents
Patents
10 patentsUS5584647ADec 17, 1996
Object handling devices
TOKYO OHKA KOGYO CO LTD146 citations98
US5083896AJan 28, 1992
Object handling device
TOKYO OHKA KOGYO CO LTD76 citations96
US5435880AJul 25, 1995
Plasma processing apparatus
TOKYO OHKA KOGYO CO LTD76 citations95
US4277525AJul 7, 1981
Liquid compositions for forming silica coating films
TOKYO OHKA KOGYO CO LTD61 citations95
US5364488ANov 15, 1994
Coaxial plasma processing apparatus
TOKYO OHKA KOGYO CO LTD47 citations92
US4749436AJun 7, 1988
Equipment for thermal stabilization process of photoresist pattern on semiconductor wafer
TOKYO OHKA KOGYO CO LTD23 citations82
US6067930AMay 30, 2000
Coaxial plasma processing apparatus
TOKYO OHKA KOGYO CO LTD13 citations73
US4868096ASep 19, 1989
Surface treatment of silicone-based coating films
TOKYO OHKA KOGYO CO LTD16 citations73
US5709519AJan 20, 1998
Plasma processing apparatus
TOKYO OHKA KOGYO CO LTD9 citations72
US5344536ASep 6, 1994
Method of and apparatus for processing a workpiece in plasma
TOKYO OHKA KOGYO CO LTD18 citations71