Inventor
YOSHIZAWA KATSUO
JP3 patents
Patents
3 patentsUS5650353AJul 22, 1997
Method for production of SOI substrate
SHINETSU HANDOTAI KK53 citations91
US5918139AJun 29, 1999
Method of manufacturing a bonding substrate
SHINETSU HANDOTAI KK23 citations90
US6534384B2Mar 18, 2003
Method for manufacturing SOI wafer including heat treatment in an oxidizing atmosphere
SHINETSU HANDOTAI KK16 citations81