Inventor
EATON JOHN K
US7 patents
⚠️ This page may combine multiple inventors who share the name “EATON JOHN K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
5 patentsUS6114781ASep 5, 2000
Cooling system for a linear or planar motor
NIKON CORP96 citations97
US5870197AFeb 9, 1999
Precision stage interferometer system with local single air duct
NIKON CORP23 citations92
US6555936B1Apr 29, 2003
Flatmotor device and exposure device
NIKON CORP24 citations90
US6947862B2Sep 20, 2005
Method for simulating slurry flow for a grooved polishing pad
NIKON CORP6 citations59
US7288864B2Oct 30, 2007
System and method for cooling motors of a lithographic tool
NIKON CORP6 citations57