Inventor

LUND GIL

US3 patents

Patents

3 patents

US6691720B2Feb 17, 2004

Multi-process system with pivoting process chamber

SEMITOOL INC9 citations71

US6427359B1Aug 6, 2002

Systems and methods for processing workpieces

SEMITOOL INC13 citations71

US6668844B2Dec 30, 2003

Systems and methods for processing workpieces

SEMITOOL INC12 citations69