Inventor
WANG DAVID Y
US51 patents
⚠️ This page may combine multiple inventors who share the name “WANG DAVID Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
15 patentsUS9228943B2Jan 5, 2016
Dynamically adjustable semiconductor metrology system
KLA TENCOR CORP31 citations93
US8860937B1Oct 14, 2014
Metrology systems and methods for high aspect ratio and large lateral dimension structures
KLA TENCOR CORP35 citations93
US9310290B2Apr 12, 2016
Multiple angles of incidence semiconductor metrology systems and methods
KLA TENCOR CORP18 citations90
US9400246B2Jul 26, 2016
Optical metrology tool equipped with modulated illumination sources
KLA TENCOR CORP5 citations83
US9921104B2Mar 20, 2018
Simultaneous multi-angle spectroscopy
KLA TENCOR CORP9 citations82
US9116103B2Aug 25, 2015
Multiple angles of incidence semiconductor metrology systems and methods
KLA TENCOR CORP7 citations82
US10801953B2Oct 13, 2020
Semiconductor metrology based on hyperspectral imaging
KLA TENCOR CORP7 citations81
US10215693B2Feb 26, 2019
Infrared spectroscopic reflectometer for measurement of high aspect ratio structures
KLA TENCOR CORP4 citations73
US9921152B2Mar 20, 2018
Systems and methods for extended infrared spectroscopic ellipsometry
KLA TENCOR CORP5 citations73
US10690602B2Jun 23, 2020
Methods and systems for measurement of thick films and high aspect ratio structures
KLA TENCOR CORP3 citations71
US10969328B2Apr 6, 2021
Optical metrology tool equipped with modulated illumination sources
KLA TENCOR CORP0 citations61
US10215688B2Feb 26, 2019
Optical metrology tool equipped with modulated illumination sources
KLA TENCOR CORP0 citations51
US9857292B2Jan 2, 2018
Broadband and wide field angle compensator
KLA TENCOR CORP0 citations50
US9519093B2Dec 13, 2016
Broadband and wide field angle compensator
KLA TENCOR CORP1 citations50
US9970863B2May 15, 2018
Optical metrology with reduced focus error sensitivity
KLA TENCOR CORP0 citations42
KLA CORP
11 patentsUS11906770B2Feb 20, 2024
Monolithic optical retarder
KLA CORP2 citations73
US11309202B2Apr 19, 2022
Overlay metrology on bonded wafers
KLA CORP5 citations73
US11137350B2Oct 5, 2021
Mid-infrared spectroscopy for measurement of high aspect ratio structures
KLA CORP2 citations73
US11231362B1Jan 25, 2022
Multi-environment polarized infrared reflectometer for semiconductor metrology
KLA CORP1 citations62
US11913874B2Feb 27, 2024
Optical metrology tool equipped with modulated illumination sources
KLA CORP0 citations61
US11119050B2Sep 14, 2021
Methods and systems for measurement of thick films and high aspect ratio structures
KLA CORP0 citations61
US11043239B2Jun 22, 2021
Magneto-optic Kerr effect metrology systems
KLA CORP1 citations57
US12461041B2Nov 4, 2025
Measurement of thick films and high aspect ratio structures
KLA CORP0 citations52
US12449352B2Oct 21, 2025
Optics for measurement of thick films and high aspect ratio structures
KLA CORP0 citations52
US12013355B2Jun 18, 2024
Methods and systems for compact, small spot size soft x-ray scatterometry
KLA CORP0 citations50
US12164093B2Dec 10, 2024
Reflective compact lens for magneto-optic Kerr effect metrology system
KLA CORP0 citations46
THERMA WAVE INC
9 patentsUS6744505B1Jun 1, 2004
Compact imaging spectrometer
THERMA WAVE INC46 citations92
US6587282B1Jul 1, 2003
Broadband refractive objective for small spot optical metrology
THERMA WAVE INC24 citations92
US7061614B2Jun 13, 2006
Measurement system with separate optimized beam paths
THERMA WAVE INC43 citations91
US7050162B2May 23, 2006
Optical metrology tool having improved contrast
THERMA WAVE INC12 citations84
US7206125B2Apr 17, 2007
Infrared blocking filter for broadband Optical metrology
THERMA WAVE INC9 citations74
US7190460B2Mar 13, 2007
Focusing optics for small spot optical metrology
THERMA WAVE INC7 citations74
US6879449B2Apr 12, 2005
Broadband refractive objective for small spot optical metrology
THERMA WAVE INC6 citations73
US7227637B2Jun 5, 2007
Measurement system with separate optimized beam paths
THERMA WAVE INC6 citations72
US7154607B2Dec 26, 2006
Flat spectrum illumination source for optical metrology
THERMA WAVE INC8 citations70
NEOAXIOM CORP
4 patentsUS6597212B1Jul 22, 2003
Divide-by-N differential phase interpolator
NEOAXIOM CORP94 citations97
US6429734B1Aug 6, 2002
Differential active loop filter for phase locked loop circuits
NEOAXIOM CORP36 citations92
US6765444B2Jul 20, 2004
Cross clocked lock detector circuit for phase locked loop
NEOAXIOM CORP15 citations83
US6531905B1Mar 11, 2003
Flip-flop with metastability reduction
NEOAXIOM CORP10 citations73
EXXON PRODUCTION RESEARCH CO
2 patentsUS5583825ADec 10, 1996
Method for deriving reservoir lithology and fluid content from pre-stack inversion of seismic data
EXXON PRODUCTION RESEARCH CO286 citations95
US5991695ANov 23, 1999
Method for determining seismic data traveltime fields on a massively parallel computer
EXXON PRODUCTION RESEARCH CO30 citations92
ROTTER LAWRENCE D
2 patentsXAQTI CORP
1 patentACARD TECHNOLOGY CORP
1 patentKLA TENCOR TECHNOLOGIES
1 patentHILL ANDREW V
1 patentEASTMAN KODAK CO
1 patentZHUANG GUORONG V
1 patentWANG DAVID Y
1 patentShowing the top 50 of 51 patents by PatentIndex Score.