P

Inventor

WANG DAVID Y

US51 patents
⚠️ This page may combine multiple inventors who share the name “WANG DAVID Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

15 patents
US9228943B2Jan 5, 2016

Dynamically adjustable semiconductor metrology system

KLA TENCOR CORP31 citations93
US8860937B1Oct 14, 2014

Metrology systems and methods for high aspect ratio and large lateral dimension structures

KLA TENCOR CORP35 citations93
US9310290B2Apr 12, 2016

Multiple angles of incidence semiconductor metrology systems and methods

KLA TENCOR CORP18 citations90
US9400246B2Jul 26, 2016

Optical metrology tool equipped with modulated illumination sources

KLA TENCOR CORP5 citations83
US9921104B2Mar 20, 2018

Simultaneous multi-angle spectroscopy

KLA TENCOR CORP9 citations82
US9116103B2Aug 25, 2015

Multiple angles of incidence semiconductor metrology systems and methods

KLA TENCOR CORP7 citations82
US10801953B2Oct 13, 2020

Semiconductor metrology based on hyperspectral imaging

KLA TENCOR CORP7 citations81
US10215693B2Feb 26, 2019

Infrared spectroscopic reflectometer for measurement of high aspect ratio structures

KLA TENCOR CORP4 citations73
US9921152B2Mar 20, 2018

Systems and methods for extended infrared spectroscopic ellipsometry

KLA TENCOR CORP5 citations73
US10690602B2Jun 23, 2020

Methods and systems for measurement of thick films and high aspect ratio structures

KLA TENCOR CORP3 citations71
US10969328B2Apr 6, 2021

Optical metrology tool equipped with modulated illumination sources

KLA TENCOR CORP0 citations61
US10215688B2Feb 26, 2019

Optical metrology tool equipped with modulated illumination sources

KLA TENCOR CORP0 citations51
US9857292B2Jan 2, 2018

Broadband and wide field angle compensator

KLA TENCOR CORP0 citations50
US9519093B2Dec 13, 2016

Broadband and wide field angle compensator

KLA TENCOR CORP1 citations50
US9970863B2May 15, 2018

Optical metrology with reduced focus error sensitivity

KLA TENCOR CORP0 citations42

KLA CORP

11 patents

THERMA WAVE INC

9 patents

NEOAXIOM CORP

4 patents

EXXON PRODUCTION RESEARCH CO

2 patents

ROTTER LAWRENCE D

2 patents

XAQTI CORP

1 patent

ACARD TECHNOLOGY CORP

1 patent

KLA TENCOR TECHNOLOGIES

1 patent

HILL ANDREW V

1 patent

EASTMAN KODAK CO

1 patent

ZHUANG GUORONG V

1 patent

WANG DAVID Y

1 patent

Showing the top 50 of 51 patents by PatentIndex Score.