Inventor
CHA RANDALL
SG8 patents
Patents
8 patentsUS6632712B1Oct 14, 2003
Method of fabricating variable length vertical transistors
CHARTERED SEMICONDUCTOR MFG89 citations97
US6534390B1Mar 18, 2003
Salicide method for producing a semiconductor device using silicon/amorphous silicon/metal structure
CHARTERED SEMICONDUCTOR MFG21 citations92
US6531386B1Mar 11, 2003
Method to fabricate dish-free copper interconnects
CHARTERED SEMICONDUCTOR MFG23 citations92
US6387747B1May 14, 2002
Method to fabricate RF inductors with minimum area
CHARTERED SEMICONDUCTOR MFG57 citations92
US6429109B1Aug 6, 2002
Method to form high k dielectric and silicide to reduce poly depletion by using a sacrificial metal between oxide and gate
CHARTERED SEMICONDUCTOR MFG18 citations84
US6610604B1Aug 26, 2003
Method of forming small transistor gates by using self-aligned reverse spacer as a hard mask
CHARTERED SEMICONDUCTOR MFG10 citations73
US6544848B1Apr 8, 2003
Method to form an asymmetrical non-volatile memory device using small in-situ doped polysilicon spacers
CHARTERED SEMICONDUCTOR MFG6 citations62
US6828082B2Dec 7, 2004
Method to pattern small features by using a re-flowable hard mask
CHARTERED SEMICONDUCTOR MFG1 citations52