Inventor
WOO TIEN-HSING
TW5 patents
Patents
5 patentsUS6752897B2Jun 22, 2004
Wet etch system with overflow particle removing feature
TAIWAN SEMICONDUCTOR MFG7 citations71
US6601986B2Aug 5, 2003
Fluid mixing apparatus
TAIWAN SEMICONDUCTOR MFG9 citations70
US6687456B1Feb 3, 2004
In-line fluid heater
TAIWAN SEMICONDUCTOR MFG5 citations60
US6571607B2Jun 3, 2003
Fluid leak detection via thermal sensing
TAIWAN SEMICONDUCTOR MFG3 citations59
US6685842B2Feb 3, 2004
Thermophoretic particle removing system
TAIWAN SEMICONDUCTOR MFG0 citations48