Inventor
HSIEH TSUNG-CHI
TW10 patents
Patents
10 patentsUS6238160B1May 29, 2001
Method for transporting and electrostatically chucking a semiconductor wafer or the like
TAIWAN SEMICONDUCTOR MFG36 citations92
US6185085B1Feb 6, 2001
System for transporting and electrostatically chucking a semiconductor wafer or the like
TAIWAN SEMICONDUCTOR MFG29 citations92
US6513542B1Feb 4, 2003
Liquid supply or drain pipe equipped with a leakage detector
TAIWAN SEMICONDUCTOR MFG30 citations91
US7204751B2Apr 17, 2007
Method and apparatus for filtering contaminants
TAIWAN SEMICONDUCTOR MFG11 citations81
US6489227B1Dec 3, 2002
Method of etching a polysilicon layer during the stripping of the photoresist shape used as an etch mask to create an opening to an underlying fuse structure
TAIWAN SEMICONDUCTOR MFG17 citations80
US6752897B2Jun 22, 2004
Wet etch system with overflow particle removing feature
TAIWAN SEMICONDUCTOR MFG7 citations71
US6601986B2Aug 5, 2003
Fluid mixing apparatus
TAIWAN SEMICONDUCTOR MFG9 citations70
US6576483B1Jun 10, 2003
Backside cannelure to provide for wafer shift detection
TAIWAN SEMICONDUCTOR MFG7 citations65
US6971270B2Dec 6, 2005
Method and apparatus for measuring gripping strength of a vacuum wand
TAIWAN SEMICONDUCTOR MFG0 citations47
US6908813B2Jun 21, 2005
Method of forming tiny silicon nitride spacer for flash EPROM by fully wet etching technology
TAIWAN SEMICONDUCTOR MFG1 citations47