Inventor

XIA CHANGFENG

US18 patents

⚠️ This page may combine multiple inventors who share the name “XIA CHANGFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

XIA CHANGFENG

TEXAS INSTRUMENTS INC

Method for forming a conductive copper structure

Method and apparatus for removing polymer residue from semiconductor wafer edge and back side

Copper surface passivation during semiconductor manufacturing

Plating-rinse-plating process for fabricating copper interconnects

Modified clean chemistry and megasonic nozzle for removing backside CMP slurries

Versatile system for wafer edge remediation

BALL SEMICONDUCTOR INC

Plasma-assisted metallic film deposition

High temperature plasma-assisted diffusion

Film growth system and method for spherical-shaped semiconductor integrated circuits

Fast deposition on spherical-shaped integrated circuits in non-contact CVD process

CSMC TECHNOLOGIES FAB1 CO LTD

Manufacturing method of MEMS chip

MEMS chip and manufacturing method therefor

Parallel plate capacitor and acceleration sensor comprising same

Monitoring structure and monitoring method for silicon wet etching depth

CSMC TECHNOLOGIES FAB2 CO LTD

MEMS microphone and preparation method therefor

Micro-Electro-Mechanical System device

XI AN ZHISENSOR TECH CO LTD

Method and circuit for obtaining capacitive feedback signal of capacitive feedback-type micro torsion mirror

SMC MULTI MEDIA PRODUCTS COMPANY LTD

Galvanometer positioning tool and laser printer