Inventor
NANJO MASATOSHI
JP8 patents
Patents
8 patentsUS6927416B2Aug 9, 2005
Wafer support plate
DISCO CORP14 citations83
US7172950B2Feb 6, 2007
Method for manufacturing semiconductor chip
DISCO CORP12 citations80
US7325692B2Feb 5, 2008
Cassette having separation plates for storing a plurality of semiconductor wafers
DISCO CORP8 citations71
US6943045B2Sep 13, 2005
Semiconductor wafer protective device and semiconductor wafer treatment method
DISCO CORP8 citations71
US6869830B2Mar 22, 2005
Method of processing a semiconductor wafer
DISCO CORP8 citations71
US7727810B2Jun 1, 2010
Wafer dividing method
DISCO CORP5 citations61
US7592235B2Sep 22, 2009
Semiconductor device including semiconductor memory element and method for producing same
DISCO CORP2 citations60
US7459767B2Dec 2, 2008
Semiconductor device including semiconductor memory element and method for producing same
DISCO CORP0 citations50