Inventor
SAITOU HISATOSHI
JP12 patents
Patents
12 patentsUS6198208B1Mar 6, 2001
Thin film piezoelectric device
TDK CORP165 citations98
US6989723B2Jan 24, 2006
Piezoelectric resonant filter and duplexer
TDK CORP133 citations97
US7239067B2Jul 3, 2007
Method of manufacturing a piezoelectric thin film resonator, manufacturing apparatus for a piezoelectric thin film resonator, piezoelectric thin film resonator, and electronic component
TDK CORP25 citations92
US7212083B2May 1, 2007
Filter device utilizing stacked resonators and acoustic coupling and branching filter using same
TDK CORP52 citations92
US6709776B2Mar 23, 2004
Multilayer thin film and its fabrication process as well as electron device
TDK CORP36 citations92
US7348714B2Mar 25, 2008
Piezoelectric resonator, filter and electronic component using the same
TDK CORP12 citations84
US7220995B2May 22, 2007
Substrate for electronic device, electronic device and methods of manufacturing same
TDK CORP8 citations73
US7170370B2Jan 30, 2007
Filter device capable of obtaining attenuation characteristic of sharpness in narrow band width and branching filter using the same
TDK CORP8 citations73
US6855996B2Feb 15, 2005
Electronic device substrate structure and electronic device
TDK CORP9 citations73
US7109637B2Sep 19, 2006
Thin-film bulk acoustic oscillator and method of manufacturing same
TDK CORP2 citations62
US6259187B1Jul 10, 2001
Piezoelectric bulk acoustic wave device
TDK CORP5 citations62
US7003875B2Feb 28, 2006
Method for manufacturing piezo-resonator
TDK CORP1 citations51