Inventor
SCHWEITZER MARC
US5 patents
⚠️ This page may combine multiple inventors who share the name “SCHWEITZER MARC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6190037B1Feb 20, 2001
Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring system
APPLIED MATERIALS INC455 citations96
US7569125B2Aug 4, 2009
Shields usable with an inductively coupled plasma reactor
APPLIED MATERIALS INC16 citations92
US7041201B2May 9, 2006
Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith
APPLIED MATERIALS INC31 citations92
US6620296B2Sep 16, 2003
Target sidewall design to reduce particle generation during magnetron sputtering
APPLIED MATERIALS INC38 citations89