Inventor
SAKUDO NORIYUKI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “SAKUDO NORIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
17 patentsUS4543465ASep 24, 1985
Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase
HITACHI LTD108 citations95
US5266146ANov 30, 1993
Microwave-powered plasma-generating apparatus and method
HITACHI LTD35 citations92
US5053678AOct 1, 1991
Microwave ion source
HITACHI LTD48 citations92
US4801847AJan 31, 1989
Charged particle accelerator using quadrupole electrodes
HITACHI LTD26 citations92
US4658143AApr 14, 1987
Ion source
HITACHI LTD29 citations92
US4633138ADec 30, 1986
Ion implanter
HITACHI LTD43 citations92
US4433228AFeb 21, 1984
Microwave plasma source
HITACHI LTD43 citations92
US4409520AOct 11, 1983
Microwave discharge ion source
HITACHI LTD29 citations92
US4101411AJul 18, 1978
Plasma etching apparatus
HITACHI LTD33 citations92
US4393333AJul 12, 1983
Microwave plasma ion source
HITACHI LTD38 citations90
US4577396AMar 25, 1986
Method of forming electrical contact to a semiconductor substrate via a metallic silicide or silicon alloy layer formed in the substrate
HITACHI LTD21 citations82
US4058748ANov 15, 1977
Microwave discharge ion source
HITACHI LTD23 citations81
US5349196ASep 20, 1994
Ion implanting apparatus
HITACHI LTD9 citations73
US4316090AFeb 16, 1982
Microwave plasma ion source
HITACHI LTD17 citations73
US5506472AApr 9, 1996
Variable-frequency type radio-frequency quadrupole accelerator including quadrupole cooling means
HITACHI LTD4 citations61
US4629930ADec 16, 1986
Plasma ion source
HITACHI LTD4 citations60
US4924101AMay 8, 1990
Charged particle source
HITACHI LTD1 citations52