Inventor
PETRIN ANDREI B
KR3 patents
Patents
3 patentsUS7393175B2Jul 1, 2008
Actuator system for nanoscale movement
SAMSUNG ELECTRONICS CO LTD8 citations65
US7081710B2Jul 25, 2006
Elementary plasma source and plasma generation apparatus using the same
SAMSUNG ELECTRONICS CO LTD1 citations50
US7355955B2Apr 8, 2008
Nanoscale digital data storage device
SAMSUNG ELECTRONICS CO LTD0 citations33