Inventor
HUANG CHI-TUNG
TW16 patents
Patents
16 patentsUS6706626B2Mar 16, 2004
Method of fabricating contact plug
MACRONIX INT CO LTD22 citations91
US6521922B1Feb 18, 2003
Passivation film on a semiconductor wafer
MACRONIX INT CO LTD21 citations91
US6565705B2May 20, 2003
Wafer carrier used for chemical mechanic polishing
MACRONIX INT CO LTD10 citations72
US6514821B1Feb 4, 2003
Method for planarizing dielectric layer of flash memory
MACRONIX INT CO LTD8 citations72
US7071102B2Jul 4, 2006
Method of forming a metal silicide layer on non-planar-topography polysilicon
MACRONIX INT CO LTD2 citations61
US6407454B1Jun 18, 2002
Inter-metal dielectric layer
MACRONIX INT CO LTD3 citations61
US7491621B2Feb 17, 2009
Method of forming isolation structures in a semiconductor manufacturing process
MACRONIX INT CO LTD2 citations60
US7498257B2Mar 3, 2009
Methods for metal ARC layer formation
MACRONIX INT CO LTD2 citations58
US6509249B1Jan 21, 2003
Method of fabricating shallow trench isolation
MACRONIX INT CO LTD5 citations57
US7544618B2Jun 9, 2009
Two-step chemical mechanical polishing process
MACRONIX INT CO LTD0 citations51
US7361601B2Apr 22, 2008
Chemical mechanical polish process and method for improving accuracy of determining polish endpoint thereof
MACRONIX INT CO LTD1 citations51
US6688969B2Feb 10, 2004
Method for planarizing a dielectric layer of a flash memory device
MACRONIX INT CO LTD0 citations51
US6559490B1May 6, 2003
Method of processing dielectric layer in ferroelectric RAM and structure of the like
MACRONIX INT CO LTD1 citations51
US6503832B2Jan 7, 2003
Application of controlling gas valves to reduce particles from CVD process
MACRONIX INT CO LTD1 citations51
US7553755B2Jun 30, 2009
Method for symmetric deposition of metal layer
MACRONIX INT CO LTD0 citations49
US8003519B2Aug 23, 2011
Systems and methods for back end of line processing of semiconductor circuits
MACRONIX INT CO LTD0 citations47