Inventor
KASAHARA JUN
JP4 patents
⚠️ This page may combine multiple inventors who share the name “KASAHARA JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
3 patentsUS7592611B2Sep 22, 2009
Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam
NUFLARE TECHNOLOGY INC28 citations91
US7949966B2May 24, 2011
Data verification method, charged particle beam writing apparatus, and computer-readable storage medium with program
NUFLARE TECHNOLOGY INC8 citations82
US7698682B2Apr 13, 2010
Writing error verification method of pattern writing apparatus and generation apparatus of writing error verification data for pattern writing apparatus
NUFLARE TECHNOLOGY INC12 citations82