Inventor
HARA SHIGEHIRO
JP27 patents
⚠️ This page may combine multiple inventors who share the name “HARA SHIGEHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
14 patentsUS7592611B2Sep 22, 2009
Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam
NUFLARE TECHNOLOGY INC28 citations91
US9558315B2Jan 31, 2017
Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatus
NUFLARE TECHNOLOGY INC8 citations83
US7504645B2Mar 17, 2009
Method of forming pattern writing data by using charged particle beam
NUFLARE TECHNOLOGY INC17 citations83
US7949966B2May 24, 2011
Data verification method, charged particle beam writing apparatus, and computer-readable storage medium with program
NUFLARE TECHNOLOGY INC8 citations82
US7698682B2Apr 13, 2010
Writing error verification method of pattern writing apparatus and generation apparatus of writing error verification data for pattern writing apparatus
NUFLARE TECHNOLOGY INC12 citations82
US10199199B2Feb 5, 2019
Drawing data creation method and charged particle beam drawing apparatus
NUFLARE TECHNOLOGY INC2 citations73
US10685435B2Jun 16, 2020
Drawing data generating method
NUFLARE TECHNOLOGY INC2 citations72
US9779913B2Oct 3, 2017
Charged particle beam drawing apparatus and drawing data generation method
NUFLARE TECHNOLOGY INC2 citations71
US9164044B2Oct 20, 2015
Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing data
NUFLARE TECHNOLOGY INC2 citations62
US7786453B2Aug 31, 2010
Charged-particle beam pattern writing method and apparatus with a pipeline process to transfer data
NUFLARE TECHNOLOGY INC4 citations62
US10503860B2Dec 10, 2019
Method of creating writing data
NUFLARE TECHNOLOGY INC0 citations41
US10445450B2Oct 15, 2019
Generating method of drawing data and charged particle beam drawing method
NUFLARE TECHNOLOGY INC0 citations41
US10096452B2Oct 9, 2018
Data processing method, charged particle beam writing method, and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations41
US9984853B2May 29, 2018
Method for generating writing data
NUFLARE TECHNOLOGY INC0 citations41
TOSHIBA KK
9 patentsUS5538815AJul 23, 1996
Method for designing phase-shifting masks with automatization capability
TOSHIBA KK183 citations98
US6047116AApr 4, 2000
Method for generating exposure data for lithographic apparatus
TOSHIBA KK62 citations96
US6566662B1May 20, 2003
Charged beam exposure system
TOSHIBA KK21 citations92
US5894057AApr 13, 1999
Charged beam drawing method
TOSHIBA KK17 citations83
US6040114AMar 21, 2000
Pattern forming method
TOSHIBA KK12 citations81
US6319642B1Nov 20, 2001
Electron beam exposure apparatus
TOSHIBA KK13 citations72
US6165652ADec 26, 2000
Pattern forming method and pattern forming apparatus
TOSHIBA KK3 citations62
US6806941B2Oct 19, 2004
Pattern forming method and pattern forming apparatus
TOSHIBA KK0 citations51
US6335145B1Jan 1, 2002
Pattern forming method and pattern forming apparatus
TOSHIBA KK0 citations51