Inventor
ANPO AKIHITO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “ANPO AKIHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
9 patentsUS7592611B2Sep 22, 2009
Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam
NUFLARE TECHNOLOGY INC28 citations91
US7750324B2Jul 6, 2010
Charged particle beam lithography apparatus and charged particle beam lithography method
NUFLARE TECHNOLOGY INC12 citations83
US7504645B2Mar 17, 2009
Method of forming pattern writing data by using charged particle beam
NUFLARE TECHNOLOGY INC17 citations83
US7949966B2May 24, 2011
Data verification method, charged particle beam writing apparatus, and computer-readable storage medium with program
NUFLARE TECHNOLOGY INC8 citations82
US7698682B2Apr 13, 2010
Writing error verification method of pattern writing apparatus and generation apparatus of writing error verification data for pattern writing apparatus
NUFLARE TECHNOLOGY INC12 citations82
US9164044B2Oct 20, 2015
Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing data
NUFLARE TECHNOLOGY INC2 citations62
US9141750B2Sep 22, 2015
Charged particle beam writing apparatus and irradiation time apportionment method of charged particle beams for multiple writing
NUFLARE TECHNOLOGY INC2 citations62
USRE47707ENov 5, 2019
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations52
US8872141B2Oct 28, 2014
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC1 citations52
YASHIMA JUN
3 patentsUS8563952B2Oct 22, 2013
Charged particle beam writing apparatus
YASHIMA JUN5 citations72
US8466440B2Jun 18, 2013
Charged particle beam drawing apparatus and control method thereof
YASHIMA JUN2 citations51
US9006691B2Apr 14, 2015
Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing block
YASHIMA JUN0 citations41
ANPO AKIHITO
3 patentsUS8471225B2Jun 25, 2013
Charged particle beam writing method and apparatus therefor
ANPO AKIHITO2 citations60
US8307314B2Nov 6, 2012
Write error verification method of writing apparatus and creation apparatus of write error verification data for writing apparatus
ANPO AKIHITO2 citations60
US8755924B2Jun 17, 2014
Charged particle beam writing method and apparatus therefor
ANPO AKIHITO0 citations39