Inventor
NAGUMO YUZO
JP6 patents
Patents
6 patentsUS7911610B2Mar 22, 2011
Optical measuring device
SHIMADZU CORP2 citations59
US9228828B2Jan 5, 2016
Thickness monitoring device, etching depth monitoring device and thickness monitoring method
SHIMADZU CORP2 citations57
US7760356B2Jul 20, 2010
Optical measuring device and method, and nanoparticle measuring method and device
SHIMADZU CORP4 citations55
US9460973B2Oct 4, 2016
Surface processing progress monitoring system
SHIMADZU CORP0 citations36
US9007599B2Apr 14, 2015
Depth of hole measurement by subtracting area of two spectra separated by time
SHIMADZU CORP0 citations36
US9001337B2Apr 7, 2015
Etching monitor device
SHIMADZU CORP0 citations36