Inventor
VERSLUIS RICHARD
NL6 patents
⚠️ This page may combine multiple inventors who share the name “VERSLUIS RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
2 patentsUS8382301B2Feb 26, 2013
Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination
ZEISS CARL SMT GMBH18 citations91
US8585224B2Nov 19, 2013
Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination
ZEISS CARL SMT GMBH11 citations82
ASML NETHERLANDS BV
2 patentsUS7963144B2Jun 21, 2011
Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system
ASML NETHERLANDS BV0 citations49
US7624617B2Dec 1, 2009
Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system
ASML NETHERLANDS BV0 citations49