Inventor

DARWIN MICHAEL J

US7 patents

⚠️ This page may combine multiple inventors who share the name “DARWIN MICHAEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZYGO CORP

3 patents

US7324214B2Jan 29, 2008

Interferometer and method for measuring characteristics of optically unresolved surface features

ZYGO CORP102 citations96

US7948636B2May 24, 2011

Interferometer and method for measuring characteristics of optically unresolved surface features

ZYGO CORP17 citations92

US7684049B2Mar 23, 2010

Interferometer and method for measuring characteristics of optically unresolved surface features

ZYGO CORP18 citations92

RUDOLPH TECHNOLOGIES INC

1 patent

US7539583B2May 26, 2009

Method and system for defect detection

RUDOLPH TECHNOLOGIES INC15 citations81

JOHNSON TIMOTHY A

1 patent

US8534135B2Sep 17, 2013

Local stress measurement

JOHNSON TIMOTHY A3 citations60

KAMENEV BORIS V

1 patent

US8818754B2Aug 26, 2014

Thin films and surface topography measurement using reduced library

KAMENEV BORIS V2 citations48

NANOVERSE TECH LTD

1 patent

US12584852B2Mar 24, 2026

Systems and methods for concurrent measurements of interferometric and ellipsometric signals of multi-layer thin films

NANOVERSE TECH LTD0 citations41