Inventor
OKAI NOBUHIRO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “OKAI NOBUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
4 patentsUS10121632B2Nov 6, 2018
Charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations72
US11852599B2Dec 26, 2023
Image processing system
HITACHI HIGH TECH CORP0 citations62
US11211224B2Dec 28, 2021
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations62
US8969801B2Mar 3, 2015
Scanning electron microscope
HITACHI HIGH TECH CORP2 citations62
OKAI NOBUHIRO
4 patentsUS8064681B2Nov 22, 2011
Method and apparatus for inspecting reticle
OKAI NOBUHIRO5 citations61
US9261360B2Feb 16, 2016
Charged particle beam microscope
OKAI NOBUHIRO2 citations60
US8742342B2Jun 3, 2014
Electron microscope
OKAI NOBUHIRO3 citations60
US8125518B2Feb 28, 2012
Scanning electron microscope
OKAI NOBUHIRO1 citations50