Inventor
KUDO YASUHISA
JP4 patents
⚠️ This page may combine multiple inventors who share the name “KUDO YASUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS7560376B2Jul 14, 2009
Method for adjoining adjacent coatings on a processing element
TOKYO ELECTRON LTD42 citations88
US10340174B2Jul 2, 2019
Mounting table and plasma processing apparatus
TOKYO ELECTRON LTD7 citations82
US10515786B2Dec 24, 2019
Mounting table and plasma processing apparatus
TOKYO ELECTRON LTD2 citations70