Inventor
TAKIMOTO MASAHIKO
JP16 patents
Patents
16 patentsUS11873916B2Jan 16, 2024
Fluid control device, fluid supply system, and fluid supply method
FUJIKIN KK2 citations73
US10883866B2Jan 5, 2021
Pressure-based flow rate control device and malfunction detection method therefor
FUJIKIN KK4 citations73
US11242934B2Feb 8, 2022
Valve device
FUJIKIN KK2 citations72
US10884436B2Jan 5, 2021
Flow rate signal correction method and flow rate control device employing same
FUJIKIN KK2 citations72
US12209679B2Jan 28, 2025
Fluid control device, fluid supply system, and fluid supply method
FUJIKIN KK0 citations62
US11796458B2Oct 24, 2023
Concentration measurement device
FUJIKIN KK1 citations62
US11506290B2Nov 22, 2022
Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method
FUJIKIN KK1 citations62
US11215374B2Jan 4, 2022
Fluid sealing device and pressure detector calibration device
FUJIKIN KK1 citations62
US11187346B2Nov 30, 2021
Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus
FUJIKIN KK1 citations62
US11416011B2Aug 16, 2022
Pressure-type flow control device and flow control method
FUJIKIN KK0 citations52
US11137779B2Oct 5, 2021
Fluid control device, method for controlling fluid control device, and fluid control system
FUJIKIN KK0 citations52
US12105019B2Oct 1, 2024
Density measurement device
FUJIKIN KK0 citations51
US11692931B2Jul 4, 2023
Concentration measurement device
FUJIKIN KK0 citations51
US11519769B2Dec 6, 2022
Flow rate control system and flow rate measurement method
FUJIKIN KK0 citations51
US11512993B2Nov 29, 2022
Valve device, adjustment information generating method, flow rate adjusting method, fluid control system, flow rate control method, semiconductor manufacturing system and semiconductor manufacturing method
FUJIKIN KK0 citations51
US11598430B2Mar 7, 2023
Valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device
FUJIKIN KK0 citations50