Inventor
PETER ANTONY PREMKUMAR
BE5 patents
Patents
5 patentsUS10090393B2Oct 2, 2018
Method for forming a field effect transistor device having an electrical contact
IMEC VZW2 citations70
US11075083B2Jul 27, 2021
Si-passivated GE gate stack
IMEC VZW0 citations55
US11854803B2Dec 26, 2023
Gate spacer patterning
IMEC VZW0 citations49
US9997458B2Jun 12, 2018
Method for manufacturing germamde interconnect structures and corresponding interconnect structures
IMEC VZW0 citations47
US9633853B2Apr 25, 2017
Method for forming an electrical contact
IMEC VZW0 citations46