Inventor

LEE DU WON

KR3 patents

Patents

3 patents

US11220659B2Jan 11, 2022

Thinner composition

ENF TECHNOLOGY CO LTD0 citations58

US11149201B2Oct 19, 2021

Silicon nitride layer etching composition

ENF TECHNOLOGY CO LTD0 citations46

US10920142B2Feb 16, 2021

Polysiloxane-based compound, silicon nitride layer etching composition including the same

ENF TECHNOLOGY CO LTD0 citations45