Inventor
CHO JANG WOO
KR3 patents
Patents
3 patentsUS10982144B2Apr 20, 2021
Silicon nitride layer etching composition and etching method using the same
ENF TECHNOLOGY CO LTD1 citations59
US11149201B2Oct 19, 2021
Silicon nitride layer etching composition
ENF TECHNOLOGY CO LTD0 citations46
US10920142B2Feb 16, 2021
Polysiloxane-based compound, silicon nitride layer etching composition including the same
ENF TECHNOLOGY CO LTD0 citations45