Inventor
PROUTY STEPHEN
US14 patents
⚠️ This page may combine multiple inventors who share the name “PROUTY STEPHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS11075105B2Jul 27, 2021
In-situ apparatus for semiconductor process module
APPLIED MATERIALS INC2 citations72
US11456161B2Sep 27, 2022
Substrate support pedestal
APPLIED MATERIALS INC3 citations66
US11887879B2Jan 30, 2024
In-situ apparatus for semiconductor process module
APPLIED MATERIALS INC0 citations62
US10586718B2Mar 10, 2020
Cooling base with spiral channels for ESC
APPLIED MATERIALS INC1 citations62
US10410900B2Sep 10, 2019
Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic
APPLIED MATERIALS INC1 citations58
US12537173B2Jan 27, 2026
Substrate support pedestal
APPLIED MATERIALS INC0 citations56