Inventor
TAE PATRICK JOHN
US8 patents
Patents
8 patentsUS12009236B2Jun 11, 2024
Sensors and system for in-situ edge ring erosion monitor
APPLIED MATERIALS INC3 citations73
US12163911B2Dec 10, 2024
Capacitive sensor housing for chamber condition monitoring
APPLIED MATERIALS INC0 citations60
US11415538B2Aug 16, 2022
Capacitive sensor housing for chamber condition monitoring
APPLIED MATERIALS INC0 citations60
US12537179B2Jan 27, 2026
Capacitive sensing data integration for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations57
US11545346B2Jan 3, 2023
Capacitive sensing data integration for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations57
US12437979B2Oct 7, 2025
Capacitive sensors and capacitive sensing locations for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations51
US11551905B2Jan 10, 2023
Resonant process monitor
APPLIED MATERIALS INC0 citations50
US11581206B2Feb 14, 2023
Capacitive sensor for chamber condition monitoring
APPLIED MATERIALS INC0 citations49