Inventor
SHANG KIYKI-SHIY N
US4 patents
Patents
4 patentsUS12537179B2Jan 27, 2026
Capacitive sensing data integration for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations57
US11545346B2Jan 3, 2023
Capacitive sensing data integration for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations57
US12317378B2May 27, 2025
Multi-zone heater control for wafer processing equipment
APPLIED MATERIALS INC0 citations46
US11586573B2Feb 21, 2023
Distributed input/output (IO) control and interlock ring architecture
APPLIED MATERIALS INC0 citations46