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Inventor
HARDY CHARLES R
US
3 patents
⚠️ This page may combine multiple inventors who share the name “HARDY CHARLES R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patents
US12537179B2
Jan 27, 2026
Capacitive sensing data integration for plasma chamber condition monitoring
APPLIED MATERIALS INC
0 citations
57
US11545346B2
Jan 3, 2023
Capacitive sensing data integration for plasma chamber condition monitoring
APPLIED MATERIALS INC
0 citations
57
HARDY CHARLES R
1 patent
US4915668A
Apr 10, 1990
Boat tunnel apparatus and method
HARDY CHARLES R
24 citations
81