Inventor
NAGARAJAN SIVASANKAR
IN6 patents
Patents
6 patentsUS11284018B1Mar 22, 2022
Smart camera substrate
APPLIED MATERIALS INC2 citations69
US12432461B2Sep 30, 2025
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US12114083B2Oct 8, 2024
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US11736818B2Aug 22, 2023
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US12537179B2Jan 27, 2026
Capacitive sensing data integration for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations57
US11545346B2Jan 3, 2023
Capacitive sensing data integration for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations57