Inventor
TAKEMOTO KEIICHI
JP9 patents
Patents
9 patentsUS10535545B2Jan 14, 2020
Substrate fixing device
SHINKO ELECTRIC IND CO3 citations69
US12080583B2Sep 3, 2024
Base plate and substrate fixing device
SHINKO ELECTRIC IND CO1 citations61
US7276438B2Oct 2, 2007
Method of manufacturing wiring substrate
SHINKO ELECTRIC IND CO2 citations60
US11909335B2Feb 20, 2024
Electrostatic chuck and substrate fixing device
SHINKO ELECTRIC IND CO0 citations59
US11699612B2Jul 11, 2023
Substrate fixing device, electrostatic chuck and electrostatic chuck manufacturing method
SHINKO ELECTRIC IND CO1 citations56
US11631598B2Apr 18, 2023
Substrate fixing device
SHINKO ELECTRIC IND CO0 citations56
US12230527B2Feb 18, 2025
Electrostatic chuck and substrate fixing device
SHINKO ELECTRIC IND CO0 citations50
US11830752B2Nov 28, 2023
Substrate fixing device, electrostatic chuck, and method of manufacturing electrostatic chuck
SHINKO ELECTRIC IND CO0 citations50
US10361110B2Jul 23, 2019
Substrate holding apparatus
SHINKO ELECTRIC IND CO0 citations48