Inventor
ROKUGAWA TAKAHIRO
JP6 patents
Patents
6 patentsUS9711476B2Jul 18, 2017
Wiring board and electronic component device
SHINKO ELECTRIC IND CO2 citations71
US9334576B2May 10, 2016
Wiring substrate and method of manufacturing wiring substrate
SHINKO ELECTRIC IND CO4 citations71
US9431333B2Aug 30, 2016
Wiring substrate
SHINKO ELECTRIC IND CO5 citations68
US9232641B2Jan 5, 2016
Wiring board and method of manufacturing the same
SHINKO ELECTRIC IND CO2 citations59
US11699612B2Jul 11, 2023
Substrate fixing device, electrostatic chuck and electrostatic chuck manufacturing method
SHINKO ELECTRIC IND CO1 citations56
US7251021B2Jul 31, 2007
Substrate transfer apparatus
SHINKO ELECTRIC IND CO0 citations38