Inventor
HABERECHT JOERG
DE9 patents
⚠️ This page may combine multiple inventors who share the name “HABERECHT JOERG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SILTRONIC AG
6 patentsUS8372298B2Feb 12, 2013
Method for producing epitaxially coated silicon wafers
SILTRONIC AG9 citations80
US10865499B2Dec 15, 2020
Susceptor for holding a semiconductor wafer, method for depositing an epitaxial layer on a front side of a semiconductor wafer, and semiconductor wafer with epitaxial layer
SILTRONIC AG3 citations69
US11578424B2Feb 14, 2023
Epitaxially coated semiconductor wafer of monocrystalline silicon and method for production thereof
SILTRONIC AG0 citations60
US11982015B2May 14, 2024
Method for depositing an epitaxial layer on a front side of a semiconductor wafer, and device for carrying out the method
SILTRONIC AG0 citations50
US11538683B2Dec 27, 2022
Method for depositing an epitaxial layer on a front side of a semiconductor wafer and device for carrying out the method
SILTRONIC AG0 citations50
US10982324B2Apr 20, 2021
Method and device for producing coated semiconductor wafers
SILTRONIC AG0 citations48