Inventor

KAPOOR SUNIL

US43 patents

⚠️ This page may combine multiple inventors who share the name “KAPOOR SUNIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAPOOR SUNIL

LAM RES CORP

Control of water bow in multiple stations

RF generator for generating a modulated frequency or an inter-modulated frequency

Multi-station plasma reactor with RF balancing

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

Control of wafer bow in multiple stations

Combiner and distributor for adjusting impedances or power across multiple plasma processing stations

Combiner and distributor for adjusting impedances or power across multiple plasma processing stations

Multiple-output radiofrequency matching module and associated methods

Multi-station plasma reactor with RF balancing

Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system

Radio frequency power generator having multiple output ports

RF signal parameter measurement in an integrated circuit fabrication chamber

Capacitance measurement without disconnecting from high power circuit

Control of wafer bow in multiple stations

RF current measurement in semiconductor processing tool

RF generator for generating a modulated frequency or an inter-modulated frequency

Multi-station plasma reactor with RF balancing

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

Mutually induced filters

Mutually induced filters

Multiple-output radiofrequency matching module and associated methods

Capacitance measurement without disconnecting from high power circuit

Combiner and distributor for adjusting impedances or power across multiple plasma processing stations

Mutually induced filters

Multiple-output radiofrequency matching module and associated methods

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

Combiner and distributor for adjusting impedances or power across multiple plasma processing stations

Multiple-output radiofrequency matching module and associated methods

Selected reject band non-radiofrequency-coupling tile and associated methods and systems

Anomalous plasma event detection and mitigation in semiconductor processing

Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system

Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system

Multiple-output radiofrequency matching module and associated methods

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

Fault detection using showerhead voltage variation

Mutually induced filters

Fault detection using showerhead voltage variation

Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching

Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching

Early warning systems and methods for determining capacitor failures

KAPOOR SUNIL

Closed loop control system for RF power balancing of the stations in a multi-station processing tool with shared RF source

SUPERCONDUCTOR TECH

Systems and methods for receiver upgrade