Inventor
VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS
NL18 patents
⚠️ This page may combine multiple inventors who share the name “VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS10649349B2May 12, 2020
Lithographic apparatus, a dryer and a method of removing liquid from a surface
ASML NETHERLANDS BV2 citations71
US10185231B2Jan 22, 2019
Lithographic apparatus, a dryer and a method of removing liquid from a surface
ASML NETHERLANDS BV2 citations71
US9213246B2Dec 15, 2015
Fluid extraction system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US12249535B2Mar 11, 2025
Substrate holder for use in a lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11749556B2Sep 5, 2023
Substrate holder for use in a lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11385547B2Jul 12, 2022
Extraction body for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11139196B2Oct 5, 2021
Substrate holder for use in a lithographic apparatus
ASML NETHERLANDS BV0 citations59
US12405539B2Sep 2, 2025
Substrate support and substrate table
ASML NETHERLANDS BV0 citations57
US10705426B2Jul 7, 2020
Extraction body for lithographic apparatus
ASML NETHERLANDS BV0 citations48
VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS
3 patentsUS8269949B2Sep 18, 2012
Lithographic apparatus and device manufacturing method
VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS5 citations57
US8125616B2Feb 28, 2012
Lithographic apparatus with pre-formed flexible transportation line
VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS0 citations41
US9052612B2Jun 9, 2015
Support structure, lithographic apparatus and method
VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS0 citations39