Inventor
BAGGEN MARK CONSTANT JOHANNES
NL13 patents
⚠️ This page may combine multiple inventors who share the name “BAGGEN MARK CONSTANT JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS10527092B2Jan 7, 2020
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations69
US10551746B2Feb 4, 2020
Lithographic apparatus and method
ASML NETHERLANDS BV2 citations68
US12306544B2May 20, 2025
Metrology tool with position control of projection system
ASML NETHERLANDS BV0 citations61
US12249535B2Mar 11, 2025
Substrate holder for use in a lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11898601B2Feb 13, 2024
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11749556B2Sep 5, 2023
Substrate holder for use in a lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11139196B2Oct 5, 2021
Substrate holder for use in a lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11098759B2Aug 24, 2021
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US8014881B2Sep 6, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations57
US10114299B2Oct 30, 2018
Lithographic apparatus
ASML NETHERLANDS BV0 citations46