Inventor
TERASHIMA RYO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TERASHIMA RYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS11380547B2Jul 5, 2022
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations56
US10658193B2May 19, 2020
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations47
US11817321B2Nov 14, 2023
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations45
US12381069B2Aug 5, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations41