Inventor
KREUZER JUSTIN LLOYD
US27 patents
⚠️ This page may combine multiple inventors who share the name “KREUZER JUSTIN LLOYD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
19 patentsUS9605947B2Mar 28, 2017
Position measurement with illumination profile having regions confined to peripheral portion of pupil
ASML HOLDING NV10 citations79
US12124177B2Oct 22, 2024
Overlay measurement system using lock-in amplifier technique
ASML HOLDING NV2 citations72
US10488767B2Nov 26, 2019
Alignment system wafer stack beam analyzer
ASML HOLDING NV2 citations69
US10908516B2Feb 2, 2021
Metrology tool and method of using the same
ASML HOLDING NV0 citations62
US11531280B2Dec 20, 2022
Compact alignment sensor arrangements
ASML HOLDING NV1 citations61
US11662198B2May 30, 2023
Optical arrangement for an inspection apparatus
ASML HOLDING NV1 citations59
US11526091B2Dec 13, 2022
Sensor apparatus and method for lithographic measurements
ASML HOLDING NV1 citations59
US11994808B2May 28, 2024
Lithographic apparatus, metrology systems, phased array illumination sources and methods thereof
ASML HOLDING NV1 citations58
US12405227B2Sep 2, 2025
Method for region of interest processing for reticle particle detection
ASML HOLDING NV0 citations56
US12405535B2Sep 2, 2025
Method for filtering an image and associated metrology apparatus
ASML HOLDING NV0 citations51
US12216414B2Feb 4, 2025
Self-referencing integrated alignment sensor
ASML HOLDING NV0 citations51
US12135505B2Nov 5, 2024
Spectrometric metrology systems based on multimode interference and lithographic apparatus
ASML HOLDING NV0 citations51
US10732524B2Aug 4, 2020
Optical system of an alignment system
ASML HOLDING NV0 citations51
US10558131B2Feb 11, 2020
Polarization independent metrology system
ASML HOLDING NV0 citations51
US10338481B2Jul 2, 2019
Polarization independent metrology system
ASML HOLDING NV0 citations51
US12572083B2Mar 10, 2026
Intensity order difference based metrology system, lithographic apparatus, and methods thereof
ASML HOLDING NV0 citations50
US11841628B2Dec 12, 2023
Apparatus for and method of sensing alignment marks
ASML HOLDING NV0 citations50
US12399000B2Aug 26, 2025
Systems and methods for measuring intensity in a lithographic alignment apparatus
ASML HOLDING NV0 citations48
US12379655B2Aug 5, 2025
Contaminant identification metrology system, lithographic apparatus, and methods thereof
ASML HOLDING NV0 citations43
ASML NETHERLANDS BV
8 patentsUS7112813B2Sep 26, 2006
Device inspection method and apparatus using an asymmetric marker
ASML NETHERLANDS BV61 citations96
US9970747B2May 15, 2018
Position measurement with illumination profile having two diametrically opposed off-axis radiation
ASML NETHERLANDS BV5 citations73
US9927726B2Mar 27, 2018
Polarization independent interferometer
ASML NETHERLANDS BV3 citations73
US9551939B2Jan 24, 2017
Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations70
US11175593B2Nov 16, 2021
Alignment sensor apparatus for process sensitivity compensation
ASML NETHERLANDS BV4 citations69
US12298257B2May 13, 2025
Monolithic particle inspection device
ASML NETHERLANDS BV1 citations60
US9857703B2Jan 2, 2018
Alignment sensor and lithographic apparatus
ASML NETHERLANDS BV0 citations42
US9506743B2Nov 29, 2016
Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations40