Inventor
OHTA MASAKATSU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “OHTA MASAKATSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
6 patentsUS5148214ASep 15, 1992
Alignment and exposure apparatus
CANON KK80 citations96
US4988188AJan 29, 1991
Illumination device
CANON KK140 citations96
US4786947ANov 22, 1988
Projection exposure apparatus
CANON KK115 citations94
US4998821AMar 12, 1991
Projection apparatus
CANON KK39 citations92
US4683524AJul 28, 1987
Illumination apparatus
CANON KK31 citations91
US7005081B2Feb 28, 2006
Base material cutting method, base material cutting apparatus, ingot cutting method, ingot cutting apparatus and wafer producing method
CANON KK1 citations51