Inventor
SHIROTA HIROYUKI
JP9 patents
Patents
9 patentsUS6903798B2Jun 7, 2005
Pattern writing apparatus and pattern writing method
DAINIPPON SCREEN MFG22 citations91
US6859223B2Feb 22, 2005
Pattern writing apparatus and pattern writing method
DAINIPPON SCREEN MFG14 citations83
US5012089AApr 30, 1991
Scanning beam control system and optical scale structure useful thereto
DAINIPPON SCREEN MFG14 citations73
US6753896B2Jun 22, 2004
Laser drawing apparatus and laser drawing method
DAINIPPON SCREEN MFG9 citations72
US5018807AMay 28, 1991
Lens system for optical beam scanner
DAINIPPON SCREEN MFG8 citations72
US4925279AMay 15, 1990
Telecentric f-θ lens system
DAINIPPON SCREEN MFG17 citations72
US7268856B2Sep 11, 2007
Pattern writing apparatus and block number determining method
DAINIPPON SCREEN MFG8 citations70
US7190435B2Mar 13, 2007
Pattern writing apparatus and pattern writing method
DAINIPPON SCREEN MFG2 citations61
US7612865B2Nov 3, 2009
Pattern writing apparatus and pattern writing method
DAINIPPON SCREEN MFG0 citations38