Inventor
MACDONALD BRUCE G
US7 patents
⚠️ This page may combine multiple inventors who share the name “MACDONALD BRUCE G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LITEL INSTR INC
6 patentsUS5142132AAug 25, 1992
Adaptive optic wafer stepper illumination system
LITEL INSTR INC130 citations97
US5094536AMar 10, 1992
Deformable wafer chuck
LITEL INSTR INC147 citations97
US5202748AApr 13, 1993
In situ process control system for steppers
LITEL INSTR INC88 citations96
US5136413AAug 4, 1992
Imaging and illumination system with aspherization and aberration correction by phase steps
LITEL INSTR INC75 citations96
US5362940ANov 8, 1994
Use of Fresnel zone plates for material processing
LITEL INSTR INC81 citations95
US5699185ADec 16, 1997
Use of fresnel zone plates for material processing
LITEL INSTR INC14 citations73