Inventor

KUSUNOKI TETURYO

JP2 patents

Patents

2 patents

US5912102AJun 15, 1999

Positive resist composition

NIPPON ZEON CO29 citations90

US5376497ADec 27, 1994

Positive quinone diazide sulfonic acid ester resist composition containing select hydroxy compound additive

NIPPON ZEON CO11 citations70