Inventor
SELTMANN ROLF
DE13 patents
⚠️ This page may combine multiple inventors who share the name “SELTMANN ROLF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
7 patentsUS7325224B2Jan 29, 2008
Method and system for increasing product yield by controlling lithography on the basis of electrical speed data
ADVANCED MICRO DEVICES INC22 citations90
US7842442B2Nov 30, 2010
Method and system for reducing overlay errors within exposure fields by APC control strategies
ADVANCED MICRO DEVICES INC23 citations89
US6493063B1Dec 10, 2002
Critical dimension control improvement method for step and scan photolithography
ADVANCED MICRO DEVICES INC17 citations77
US7618755B2Nov 17, 2009
Method and system for automatically detecting exposed substrates having a high probability for defocused exposure fields
ADVANCED MICRO DEVICES INC3 citations62
US7006195B2Feb 28, 2006
Method and system for improving exposure uniformity in a step and repeat process
ADVANCED MICRO DEVICES INC4 citations60
US6946411B2Sep 20, 2005
Method and system for improving the efficiency of a mechanical alignment tool
ADVANCED MICRO DEVICES INC3 citations60
US8039181B2Oct 18, 2011
Method and system for reducing overlay errors in semiconductor volume production using a mixed tool scenario
ADVANCED MICRO DEVICES INC5 citations59
SELTMANN ROLF
2 patentsUS8605250B2Dec 10, 2013
Method and system for detecting particle contamination in an immersion lithography tool
SELTMANN ROLF2 citations57
US8332783B2Dec 11, 2012
Control of critical dimensions in optical imaging processes for semiconductor production by extracting imaging imperfections on the basis of imaging tool specific intensity measurements and simulations
SELTMANN ROLF2 citations51