Inventor
ENICHEN WILLIAM A
US11 patents
⚠️ This page may combine multiple inventors who share the name “ENICHEN WILLIAM A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
10 patentsUS5585629ADec 17, 1996
Electron beam nano-metrology system
IBM36 citations92
US5552611ASep 3, 1996
Pseudo-random registration masks for projection lithography tool
IBM40 citations91
US5621216AApr 15, 1997
Hardware/software implementation for multipass E-beam mask writing
IBM39 citations88
US5301124AApr 5, 1994
Registration of patterns formed of multiple fields
IBM46 citations88
US5763894AJun 9, 1998
Calibration patterns and techniques for charged particle projection lithography systems
IBM14 citations71
US5570405AOct 29, 1996
Registration and alignment technique for X-ray mask fabrication
IBM18 citations69
US6388516B1May 14, 2002
Precision high speed magnetic coil driver circuit
IBM4 citations62
US7391023B2Jun 24, 2008
Lithography tool image quality evaluating and correcting
IBM4 citations61
US6931337B2Aug 16, 2005
Lithography tool image quality evaluating and correcting
IBM0 citations51
US5838013ANov 17, 1998
Method for monitoring resist charging in a charged particle system
IBM1 citations50